Industrial Robots / Wafer Handler
  • Excellent structural rigidity.
  • Modular and highly customizable design.
  • Vertical travel 400 mm.
  • High response brushless servo motors.
  • Absolute encoders for instant readiness after power up.
  • Handling radial and in-line wafer pick and place.
  • Standard RS-232 and TCP/IP interface communication.
  • Advanced 32-bit real-time motion control kernel.
  • Powerful wafer handling firmware.
  • Comprehensive software tools and utilities.
  • Software emulation for legacy robot macro commands.
  • General purpose digital inputs and outputs for custom use.
  • Class 1 clean-room environment compatibility.
  • Reliability: MTBF > 60000 hours, MCBF > 10,000,000 cycles.
  • Input Voltage Range: 100 to 240VAC
  • Wafer Size: 300
  • Z-Stroke: 400mm


He-Five provides automation solutions through reliable wafer handling equipment. Our mission is to deliver the best and most effective products on the market.

Our AT400DA robots are used in the atmospheric wafer handling solutions. They are designed with current and up-to-date technology; producing significant advancement in performance, minimizing contamination, and ensuring reliability for years to come.


Innovative Structural Design

  • AT400DA’s high-strength backbone allows for universal mounting.
  • The structure offers a high degree of modularity.
  • Compliance with SEMI S2 and other industry safety standards.

Advanced Motion Control Platform

  • Distributed motion control architecture.
  • Easy cabling management and maintenance.
  • Advanced servo algorithms.
  • Flexible and powerful programming language.
  • Intuitive, user-friendly software toolbox.

Wafer Handling Software Application

  • Powerful robot firmware
  • Emulation for legacy robots
  • Self-calibration, alignment on-the-fly
  • Wafer ID Reading
  • Cassette Mapping
AxisMotion RangeMaximum VelocityMaximum AccelerationAxis Repeatability
T> 360°
R±17 inch50 inch/s300 inch/s²±0.001 inch
±0.025 mm
Z15.75 inch18 inch/s44 inch/s²±0.001 inch
±0.025 mm

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