Wafer/Panel Handling
END EFFECTORS
Robot EndpointWafer/Panel Handling
Blade Type
| Serial No. | Type | Wafer Sizes |
|---|---|---|
| 431-00002 | Blade | 300mm and up |
| 431-00012 | Blade | 200mm and down |
Fork Type
| Serial No. | Type | Wafer Sizes |
|---|---|---|
| 431-00003 | Fork | 300mm and up |
| 431-00013 | Fork | 200mm and down |
