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Semiconductor HandlingFlat Panel Handling

WAFER TRANSFER ROBOTS

Industrial Robots
  • Excellent structural rigidity.
  • Modular and highly customizable design.
  • High response brushless servo motors.
  • Absolute encoders for instant readiness after power up.
  • Handling radial and in-line wafer pick and place.
  • Standard RS-232 and TCP/IP interface communication.
  • Advanced 32-bit real-time motion control kernel.
  • Powerful wafer handling firmware.
  • Comprehensive software tools and utilities.
  • Software emulation for legacy robot macro commands.
  • General purpose digital inputs and outputs for custom use.
  • Class 1 clean-room environment compatibility.
  • Reliability; MTBF > 60000 hours, MCBF > 10,000,000 cycles.
Semiconductor HandlingFlat Panel Handling

YOUR PARTNERS IN RISK REDUCTION

He-Five provides automation solutions through reliable wafer handling equipment. Our mission is to deliver the best and most effective products on the market. Our wafer transfer robots are used in atmospheric wafer handling solutions. They are designed with current and up-to-date technology; producing significant advancement in performance, minimizing contamination, and ensuring reliability for years to come.

WHAT DIFFERENTIATES OUR OFFERING

Innovative Structural Design

  • High-strength backbone allows for universal mounting.
  • The structure offers a high degree of modularity.
  • Compliance with SEMI S2 and other industry safety standards.

Advanced Motion Control Platform

  • Distributed motion control architecture.
  • Easy cabling management and maintenance.
  • Advanced servo algorithms.
  • Flexible and powerful programming language.
  • Intuitive, user-friendly software toolbox.

Wafer Handling Software Application

  • Powerful robot firmware
  • Emulation for legacy robots
  • Self-calibration, alignment on-the-fly
  • Wafer ID Reading
  • Cassette Mapping
Input Voltage Range
  • 100 to 240VAC
Wafer Sizes
  • 51mm, 76mm, 100mm, 125mm, 150mm, 200mm, 300mm
Encoder Type
  • Absolute, battery backup
Operating Temperature
  • 50ºF to 104ºF
  • 10ºC to 40ºC
Axes of Motion
  • Radial - X/Y Offset
  • Theta - Rotate Chuck
  • Z - Raise/Lower Pins
Communication
  • RS-232
  • Ethernet
Detection
  • Optical, Non-contact
Flat & Notch Compatibility
  • Entire SEMI Range
Cleanliness
  • Class 1

Configuration Map

B
  • Bottom Mount : B
  • Top Mount : T
 470
  • Z-Stroke : ###
 DA
  • Single-Arm : SA
  • Dual-Arm : DA
 155
  • Arm link length : ###
 M
  • None : N
  • With mapping sensor : M
  • With fiber optic sensor : F
 8
  • Max wafer size (inch) : #
 E-08
  • End-effector part number : E-##

SINGLE ARM (3-axis)

Model Z-Stroke (mm) Total Reach (mm) Links (mm/mm)
Bottom Mount
B300SA110 300 220 110/110
B300SA200 300 400 200/200
B400SA110 400 220 110/110
B400SA200 400 400 200/200
Top Mount
T300SA110 300 220 110/110
T300SA200 300 400 200/200
T400SA110 400 220 110/110
T400SA200 400 400 200/200

DUAL ARM (4-axis)

Model Z-Stroke (mm) Total Reach (mm) Links (mm/mm)
Bottom Mount
B400DA155 400 310 155/155
B400DA225 400 450 225/225
B470DA155 470 310 155/155
B470DA225 470 450 225/225
Top Mount
T400DA155 400 310 155/155
T400DA225 400 450 225/225
T470DA155 470 310 155/155
T470DA225 470 450 225/225